Inventor
JONES PAMELA E
US3 patents
Patents
3 patentsUS5554485ASep 10, 1996
Mid and deep-UV antireflection coatings and methods for use thereof
IBM56 citations95
US5401614AMar 28, 1995
Mid and deep-UV antireflection coatings and methods for use thereof
IBM68 citations95
US5372912ADec 13, 1994
Radiation-sensitive resist composition and process for its use
IBM55 citations94