Inventor
WELSH KEVIN M
US7 patents
Patents
7 patentsUS5554485ASep 10, 1996
Mid and deep-UV antireflection coatings and methods for use thereof
IBM56 citations95
US5401614AMar 28, 1995
Mid and deep-UV antireflection coatings and methods for use thereof
IBM68 citations95
US5607824AMar 4, 1997
Antireflective coating for microlithography
IBM61 citations94
US5482817AJan 9, 1996
Mid and deep-uv antireflection coatings and methods for use thereof
IBM70 citations94
US5380621AJan 10, 1995
Mid and deep-UV antireflection coatings and methods for use thereof
IBM57 citations94
US5372912ADec 13, 1994
Radiation-sensitive resist composition and process for its use
IBM55 citations94
US5164278ANov 17, 1992
Speed enhancers for acid sensitized resists
IBM41 citations92