Inventor
GROOT PETER DE
US5 patents
Patents
5 patentsUS6597460B2Jul 22, 2003
Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum
ZYGO CORP78 citations96
US6359692B1Mar 19, 2002
Method and system for profiling objects having multiple reflective surfaces using wavelength-tuning phase-shifting interferometry
ZYGO CORP306 citations96
US5526116AJun 11, 1996
Method and apparatus for profiling surfaces using diffractive optics which impinges the beams at two different incident angles
ZYGO CORP58 citations94
US6775006B2Aug 10, 2004
Height scanning interferometry method and apparatus including phase gap analysis
ZYGO CORP44 citations89
US7639367B2Dec 29, 2009
Interferometer system for monitoring an object
ZYGO CORP9 citations83