Inventor
COTLER TINA J
US4 patents
Patents
4 patentsUS5505816AApr 9, 1996
Etching of silicon dioxide selectively to silicon nitride and polysilicon
IBM328 citations98
US5382911AJan 17, 1995
Reaction chamber interelectrode gap monitoring by capacitance measurement
IBM32 citations89
US5534066AJul 9, 1996
Fluid delivery apparatus having an infrared feedline sensor
IBM14 citations73
US5492718AFeb 20, 1996
Fluid delivery apparatus and method having an infrared feedline sensor
IBM11 citations73