Inventor
RICHARDSON DANIEL B
US5 patents
⚠️ This page may combine multiple inventors who share the name “RICHARDSON DANIEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
4 patentsUS6635117B1Oct 21, 2003
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
AXCELIS TECH INC609 citations97
US6782843B2Aug 31, 2004
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
AXCELIS TECH INC68 citations94
US6597003B2Jul 22, 2003
Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers
AXCELIS TECH INC20 citations91
US6547458B1Apr 15, 2003
Optimized optical system design for endpoint detection
AXCELIS TECH INC16 citations81