Inventor
FENG JIAN-HUEI
US6 patents
⚠️ This page may combine multiple inventors who share the name “FENG JIAN-HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FENG JIAN-HUEI
3 patentsUS9213322B1Dec 15, 2015
Methods for providing run to run process control using a dynamic tuner
FENG JIAN-HUEI0 citations34
US9110465B1Aug 18, 2015
Methods for providing asymmetric run to run control of process parameters
FENG JIAN-HUEI0 citations34
US8500916B2Aug 6, 2013
Method for aligning wafers within wafer processing equipment
FENG JIAN-HUEI0 citations34