Inventor
NAMBU YUKO
JP4 patents
Patents
4 patentsUS6475815B1Nov 5, 2002
Method of measuring temperature, method of taking samples for temperature measurement and method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD21 citations90
US6799888B2Oct 5, 2004
Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations71
US6666577B2Dec 23, 2003
Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD12 citations71
US6616331B2Sep 9, 2003
Method for predicting temperature and test wafer for use in temperature prediction
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations60