Inventor
TAKAMATSU YUKICHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMATSU YUKICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JAPAN PIONICS
13 patentsUS6666921B2Dec 23, 2003
Chemical vapor deposition apparatus and chemical vapor deposition method
JAPAN PIONICS23 citations91
US6473563B2Oct 29, 2002
Vaporizer and apparatus for vaporizing and supplying
JAPAN PIONICS22 citations91
US6155540ADec 5, 2000
Apparatus for vaporizing and supplying a material
JAPAN PIONICS36 citations91
US6106898AAug 22, 2000
Process for preparing nitride film
JAPAN PIONICS27 citations91
US7036801B2May 2, 2006
Vaporizer and apparatus for vaporizing and supplying
JAPAN PIONICS12 citations82
US6638489B2Oct 28, 2003
Cleaning process and cleaning agent for harmful gas
JAPAN PIONICS10 citations72
US6461407B2Oct 8, 2002
Method and apparatus for supplying liquid raw material
JAPAN PIONICS10 citations72
US6100415AAug 8, 2000
Purified alkoxide and process for purifying crude alkoxide
JAPAN PIONICS10 citations72
US6592674B2Jul 15, 2003
Chemical vapor deposition apparatus and chemical vapor deposition method
JAPAN PIONICS11 citations70
US6767402B2Jul 27, 2004
Method for vaporizing and supplying
JAPAN PIONICS8 citations69
US7489857B2Feb 10, 2009
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process
JAPAN PIONICS2 citations61
US7195795B2Mar 27, 2007
Material for forming insulation film and film-forming method with the use of the material
JAPAN PIONICS3 citations58
US7297322B2Nov 20, 2007
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process
JAPAN PIONICS0 citations51