Inventor
YONEYAMA TAKEO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YONEYAMA TAKEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JAPAN PIONICS
7 patentsUS6473563B2Oct 29, 2002
Vaporizer and apparatus for vaporizing and supplying
JAPAN PIONICS22 citations91
US6155540ADec 5, 2000
Apparatus for vaporizing and supplying a material
JAPAN PIONICS36 citations91
US6106898AAug 22, 2000
Process for preparing nitride film
JAPAN PIONICS27 citations91
US6461407B2Oct 8, 2002
Method and apparatus for supplying liquid raw material
JAPAN PIONICS10 citations72
US6100415AAug 8, 2000
Purified alkoxide and process for purifying crude alkoxide
JAPAN PIONICS10 citations72
US6767402B2Jul 27, 2004
Method for vaporizing and supplying
JAPAN PIONICS8 citations69
US7195795B2Mar 27, 2007
Material for forming insulation film and film-forming method with the use of the material
JAPAN PIONICS3 citations58