Inventor
KIRIYAMA KOJI
JP6 patents
Patents
6 patentsUS6473563B2Oct 29, 2002
Vaporizer and apparatus for vaporizing and supplying
JAPAN PIONICS22 citations91
US7036801B2May 2, 2006
Vaporizer and apparatus for vaporizing and supplying
JAPAN PIONICS12 citations82
US6767402B2Jul 27, 2004
Method for vaporizing and supplying
JAPAN PIONICS8 citations69
US7489857B2Feb 10, 2009
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process
JAPAN PIONICS2 citations61
US7195795B2Mar 27, 2007
Material for forming insulation film and film-forming method with the use of the material
JAPAN PIONICS3 citations58
US7297322B2Nov 20, 2007
Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process
JAPAN PIONICS0 citations51