Inventor
BEST KEITH FRANK
US16 patents
⚠️ This page may combine multiple inventors who share the name “BEST KEITH FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS6844244B2Jan 18, 2005
Dual sided lithographic substrate imaging
ASML NETHERLANDS BV19 citations89
US7442476B2Oct 28, 2008
Method and system for 3D alignment in wafer scale integration
ASML NETHERLANDS BV11 citations82
US7562686B2Jul 21, 2009
Method and system for 3D alignment in wafer scale integration
ASML NETHERLANDS BV10 citations80
US7130049B2Oct 31, 2006
Method of measurement, method for providing alignment marks, and device manufacturing method
ASML NETHERLANDS BV10 citations72
US7113258B2Sep 26, 2006
Lithographic apparatus
ASML NETHERLANDS BV9 citations70
US7501215B2Mar 10, 2009
Device manufacturing method and a calibration substrate
ASML NETHERLANDS BV3 citations61
US7410880B2Aug 12, 2008
Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate
ASML NETHERLANDS BV2 citations61
US7019814B2Mar 28, 2006
Lithographic projection mask, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations61
US6914664B2Jul 5, 2005
Lithographic apparatus, alignment method and device manufacturing method
ASML NETHERLANDS BV5 citations61
US7494828B2Feb 24, 2009
Substrate holder and device manufacturing method
ASML NETHERLANDS BV2 citations55
US7041996B2May 9, 2006
Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby
ASML NETHERLANDS BV0 citations49
US7133117B2Nov 7, 2006
Dual sided lithographic substrate imaging
ASML NETHERLANDS BV1 citations48
US7320847B2Jan 22, 2008
Alternate side lithographic substrate imaging
ASML NETHERLANDS BV0 citations40
US7567340B2Jul 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36