Inventor

HANIKA MARKUS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HANIKA MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HANIKA MARKUS

1 patent

US8083911B2Dec 27, 2011

Apparatus for treating a substrate

HANIKA MARKUS2 citations49

APPLIED MATERIALS GMBH & CO KG

1 patent

US7575662B2Aug 18, 2009

Method for operating a sputter cathode with a target

APPLIED MATERIALS GMBH & CO KG0 citations42

MAHNKE GUIDO

1 patent

US8980071B2Mar 17, 2015

Apparatus and method for detecting a state of a deposition apparatus

MAHNKE GUIDO0 citations20