Inventor
HSU YUNG-LIN
TW16 patents
⚠️ This page may combine multiple inventors who share the name “HSU YUNG-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS10255785B1Apr 9, 2019
Intelligent environmental and security monitoring system
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10564632B2Feb 18, 2020
Systems and methods for sensory automated material handing
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations82
US11195720B2Dec 7, 2021
Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11901206B2Feb 13, 2024
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11587811B2Feb 21, 2023
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11011401B2May 18, 2021
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12272580B2Apr 8, 2025
Modular pressurized workstation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12051593B2Jul 30, 2024
Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11615961B2Mar 28, 2023
Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10867823B2Dec 15, 2020
Fault detection method in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10618534B2Apr 14, 2020
Monitor vehicle for a rail system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10464583B2Nov 5, 2019
Monitor vehicle for a rail system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11626315B2Apr 11, 2023
Semiconductor structure and planarization method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48