Inventor
SHIN DONG-WOON
KR7 patents
⚠️ This page may combine multiple inventors who share the name “SHIN DONG-WOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS7807543B2Oct 5, 2010
Methods of manufacturing trench isolation structures using selective plasma ion immersion implantation and deposition (PIIID)
SAMSUNG ELECTRONICS CO LTD8 citations83
US7785985B2Aug 31, 2010
Methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD4 citations62
US7871897B2Jan 18, 2011
Method of forming shallow trench isolation regions in devices with NMOS and PMOS regions
SAMSUNG ELECTRONICS CO LTD5 citations61
US9230922B2Jan 5, 2016
Precursor composition for deposition of silicon dioxide film and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations41
US8877634B2Nov 4, 2014
Methods of forming a fine pattern on a substrate and methods of forming a semiconductor device having a fine pattern
SAMSUNG ELECTRONICS CO LTD0 citations41