P

Inventor

SHIRAISHI DAISUKE

JP68 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAISHI DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

21 patents
US9324588B2Apr 26, 2016

Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP7 citations84
US7166480B2Jan 23, 2007

Particle control device and particle control method for vacuum processing apparatus

HITACHI HIGH TECH CORP10 citations84
US6908529B2Jun 21, 2005

Plasma processing apparatus and method

HITACHI HIGH TECH CORP8 citations74
US11410836B2Aug 9, 2022

Analysis method and semiconductor etching apparatus

HITACHI HIGH TECH CORP2 citations73
US10510519B2Dec 17, 2019

Plasma processing apparatus and data analysis apparatus

HITACHI HIGH TECH CORP3 citations73
US10262842B2Apr 16, 2019

Analysis method and semiconductor etching apparatus

HITACHI HIGH TECH CORP2 citations73
US9464936B2Oct 11, 2016

Plasma processing apparatus and analyzing apparatus

HITACHI HIGH TECH CORP3 citations73
US9443704B2Sep 13, 2016

Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP4 citations73
US9091595B2Jul 28, 2015

Analysis method, analysis device, and etching processing system

HITACHI HIGH TECH CORP4 citations73
US7330346B2Feb 12, 2008

Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus

HITACHI HIGH TECH CORP6 citations63
US7122096B2Oct 17, 2006

Method and apparatus for processing semiconductor

HITACHI HIGH TECH CORP2 citations63
US12442770B2Oct 14, 2025

Plasma processing apparatus, plasma processing method and plasma processing analysis method

HITACHI HIGH TECH CORP0 citations62
US11643727B2May 9, 2023

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations62
US11538671B2Dec 27, 2022

Plasma processing apparatus and data analysis apparatus

HITACHI HIGH TECH CORP0 citations62
US11404253B2Aug 2, 2022

Plasma processing apparatus and analysis method for analyzing plasma processing data

HITACHI HIGH TECH CORP0 citations62
US10734207B2Aug 4, 2020

Plasma processing apparatus and analysis method for analyzing plasma processing data

HITACHI HIGH TECH CORP1 citations62
US6916396B2Jul 12, 2005

Etching system and etching method

HITACHI HIGH TECH CORP4 citations62
US12014909B2Jun 18, 2024

Plasma processing apparatus and plasma processing system

HITACHI HIGH TECH CORP0 citations61
US11289313B2Mar 29, 2022

Plasma processing apparatus

HITACHI HIGH TECH CORP1 citations61
US10872750B2Dec 22, 2020

Plasma processing apparatus and plasma processing system

HITACHI HIGH TECH CORP1 citations61
US12525442B2Jan 13, 2026

Plasma processing apparatus, data analysis apparatus, and semiconductor device manufacturing system

HITACHI HIGH TECH CORP0 citations56

CANON KK

9 patents

HITACHI LTD

5 patents

MORISAWA TOSHIHIRO

4 patents

KAGOSHIMA AKIRA

2 patents

SHIRAISHI DAISUKE

2 patents

KANEKO SHUHEI

1 patent

OLYMPUS IMAGING CORP

1 patent

OLYMPUS CORP

1 patent

SK HYNIX INC

1 patent

MINAMI TOSHIAKI

1 patent

UCHIDA HIROSHIGE

1 patent

TOYOTA MOTOR CO LTD

1 patent

Showing the top 50 of 68 patents by PatentIndex Score.