Inventor
KASAI YOSHINOBU
JP3 patents
Patents
3 patentsUS10192721B2Jan 29, 2019
High-frequency power source
DAIHEN CORP9 citations78
US5760544AJun 2, 1998
Magnetron microwave generator with filament-life diagnostic circuit
DAIHEN CORP9 citations70
US9110106B2Aug 18, 2015
Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector
DAIHEN CORP3 citations56