Inventor
CHEN CHENG CHIEH
TW16 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHENG CHIEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
13 patentsUS12500095B2Dec 16, 2025
Exposure module with cleaning scrubber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12070779B2Aug 27, 2024
Method of manufacturing semiconductor wafer and cleaning scrubber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11226564B2Jan 18, 2022
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12360464B2Jul 15, 2025
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12362160B2Jul 15, 2025
Method for forming layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12191127B2Jan 7, 2025
Apparatus for physical vapor deposition and method for forming a layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11782350B2Oct 10, 2023
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11520243B2Dec 6, 2022
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11158989B2Oct 26, 2021
Laser source device, extreme ultraviolet lithography device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10624196B1Apr 14, 2020
Laser source device and extreme ultraviolet lithography device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12370648B2Jul 29, 2025
Surface clean system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9791415B2Oct 17, 2017
Method for monitoring usage of a physical vapor deposition (PVD) target with an ultrasonic transducer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9970105B2May 15, 2018
Method for sealing processing module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36