Inventor
YOSHIZAKO YUJI
JP3 patents
Patents
3 patentsUS5844369ADec 1, 1998
Automatic phase adjusting circuit for a plasma processing apparatus
DAIHEN CORP30 citations86
US5399977AMar 21, 1995
Microwave power source apparatus for microwave oscillator comprising means for automatically adjusting progressive wave power and control method therefor
DAIHEN CORP8 citations71
US9110106B2Aug 18, 2015
Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector
DAIHEN CORP3 citations56