Inventor

SAITO HIROKUNI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SAITO HIROKUNI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKESHITA MASARU

2 patents

US8486605B2Jul 16, 2013

Positive resist composition and method of forming resist pattern

TAKESHITA MASARU9 citations81

US9023577B2May 5, 2015

Resist composition and method of forming resist pattern

TAKESHITA MASARU1 citations49

YOKOYA JIRO

2 patents

US9411224B2Aug 9, 2016

Method of forming resist pattern

YOKOYA JIRO0 citations36

US8877432B2Nov 4, 2014

Method of forming resist pattern and resist composition

YOKOYA JIRO0 citations36

TOKYO OHKA KOGYO CO LTD

1 patent

US11703757B2Jul 18, 2023

Resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD0 citations48