Inventor

SU YIH-CHEN

TW7 patents

⚠️ This page may combine multiple inventors who share the name “SU YIH-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

5 patents

US11029593B2Jun 8, 2021

Lithography mask with a black border regions and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US10866504B2Dec 15, 2020

Lithography mask with a black border region and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US11048158B2Jun 29, 2021

Method for extreme ultraviolet lithography mask treatment

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70

US11852966B2Dec 26, 2023

Lithography mask with a black border regions and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11906897B2Feb 20, 2024

Method for extreme ultraviolet lithography mask treatment

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

LEE HSIN-CHANG

1 patent

US8916482B2Dec 23, 2014

Method of making a lithography mask

LEE HSIN-CHANG5 citations72

TAIWAN SEMICONDUCTOR MFG

1 patent

US6962878B2Nov 8, 2005

Method to reduce photoresist mask line dimensions

TAIWAN SEMICONDUCTOR MFG0 citations48