Inventor
YATI ARPIT
IN11 patents
⚠️ This page may combine multiple inventors who share the name “YATI ARPIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS9940704B2Apr 10, 2018
Pre-layer defect site review using design
KLA TENCOR CORP5 citations69
US11275361B2Mar 15, 2022
Systems and methods for predicting defects and critical dimension using deep learning in the semiconductor manufacturing process
KLA TENCOR CORP1 citations59
US10970834B2Apr 6, 2021
Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance
KLA TENCOR CORP0 citations59
US10692690B2Jun 23, 2020
Care areas for improved electron beam defect detection
KLA TENCOR CORP1 citations59
US10204416B2Feb 12, 2019
Automatic deskew using design files or inspection images
KLA TENCOR CORP1 citations54
US11094053B2Aug 17, 2021
Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates
KLA TENCOR CORP0 citations48
US11035666B2Jun 15, 2021
Inspection-guided critical site selection for critical dimension measurement
KLA TENCOR CORP0 citations47
US10957608B2Mar 23, 2021
Guided scanning electron microscopy metrology based on wafer topography
KLA TENCOR CORP0 citations47
US9947596B2Apr 17, 2018
Range-based real-time scanning electron microscope non-visual binner
KLA TENCOR CORP0 citations42