Inventor

EACOBACCI JR MICHAEL J

US11 patents

⚠️ This page may combine multiple inventors who share the name “EACOBACCI JR MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HELIX TECH CORP

4 patents

US5906102AMay 25, 1999

Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve

HELIX TECH CORP19 citations89

US5775109AJul 7, 1998

Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor

HELIX TECH CORP40 citations89

US5819545AOct 13, 1998

Cryopump with selective condensation and defrost

HELIX TECH CORP19 citations85

US6510697B2Jan 28, 2003

System and method for recovering from a power failure in a cryopump

HELIX TECH CORP14 citations79

BROOKS AUTOMATION INC

2 patents

US9687753B2Jun 27, 2017

Multi-refrigerator high speed cryopump

BROOKS AUTOMATION INC1 citations51

US9926919B2Mar 27, 2018

Cryopump

BROOKS AUTOMATION INC0 citations49

BARTLETT ALLEN J

2 patents

US8082741B2Dec 27, 2011

Integral facet cryopump, water vapor pump, or high vacuum pump

BARTLETT ALLEN J0 citations50

US10760562B2Sep 1, 2020

Pressure burst free high capacity cryopump

BARTLETT ALLEN J0 citations38

SYSSOEV SERGEI

1 patent

US9266038B2Feb 23, 2016

Cryopump

SYSSOEV SERGEI8 citations77

EACOBACCI JR MICHAEL J

1 patent

US9266039B2Feb 23, 2016

Cryopump with controlled hydrogen gas release

EACOBACCI JR MICHAEL J4 citations65

EDWARDS VACUUM LLC

1 patent

US10632399B2Apr 28, 2020

Multi-refrigerator high speed cryopump

EDWARDS VACUUM LLC0 citations51