Inventor
ROBBINS ROGER A
US8 patents
Patents
8 patentsUS5423942AJun 13, 1995
Method and apparatus for reducing etching erosion in a plasma containment tube
TEXAS INSTRUMENTS INC493 citations98
US6300294B1Oct 9, 2001
Lubricant delivery for micromechanical devices
TEXAS INSTRUMENTS INC103 citations97
US6365229B1Apr 2, 2002
Surface treatment material deposition and recapture
TEXAS INSTRUMENTS INC79 citations96
US5474614ADec 12, 1995
Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp
TEXAS INSTRUMENTS INC65 citations95
US6992375B2Jan 31, 2006
Anchor for device package
TEXAS INSTRUMENTS INC50 citations92
US7264179B2Sep 4, 2007
Method and apparatus for MEMS device nebulizer lubrication system
TEXAS INSTRUMENTS INC22 citations91
US6921680B2Jul 26, 2005
Method and apparatus for MEMS device nebulizer lubrication system
TEXAS INSTRUMENTS INC20 citations91
US5266527ANov 30, 1993
Conformal wafer chuck for plasma processing having a non-planar surface
TEXAS INSTRUMENTS INC7 citations72