P

Inventor

YAWATA SHIGEO

JP4 patents
⚠️ This page may combine multiple inventors who share the name “YAWATA SHIGEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

3 patents
US5731637AMar 24, 1998

Semiconductor device

TOSHIBA KK27 citations91
US5015593AMay 14, 1991

Method of manufacturing semiconductor device

TOSHIBA KK27 citations85
US5130261AJul 14, 1992

Method of rendering the impurity concentration of a semiconductor wafer uniform

TOSHIBA KK8 citations68

TOKYO SHIBAURA ELECTRIC CO

1 patent
US4451303AMay 29, 1984

Diffusion of aluminum

TOKYO SHIBAURA ELECTRIC CO9 citations71