Inventor
OSADA HATSUO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OSADA HATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS5647945AJul 15, 1997
Vacuum processing apparatus
TOKYO ELECTRON LTD308 citations98
US5951772ASep 14, 1999
Vacuum processing apparatus
TOKYO ELECTRON LTD104 citations97
US5333986AAug 2, 1994
Transfer apparatus
TOKYO ELECTRON LTD82 citations94
US7648610B2Jan 19, 2010
Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate
TOKYO ELECTRON LTD42 citations91