Inventor
KOTACHI AKIKO
JP11 patents
Patents
11 patentsUS6013416AJan 11, 2000
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD164 citations99
US5968713AOct 19, 1999
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD165 citations99
US6329125B2Dec 11, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD154 citations98
US6200725B1Mar 13, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD105 citations97
US5856071AJan 5, 1999
Resist material including si-containing resist having acid removable group combined with photo-acid generator
FUJITSU LTD20 citations92
US5403699AApr 4, 1995
Process for formation of resist patterns
FUJITSU LTD11 citations73
US5326670AJul 5, 1994
Process for forming resist pattern
FUJITSU LTD15 citations73
US5192643AMar 9, 1993
Pattern-forming method and radiation resist for use when working this pattern-forming method
FUJITSU LTD9 citations73
US5153103AOct 6, 1992
Resist composition and pattern formation process
FUJITSU LTD15 citations73
US5104479AApr 14, 1992
Resist material for energy beam lithography and method of using the same
FUJITSU LTD10 citations73
US5066751ANov 19, 1991
Resist material for energy beam lithography and method of using the same
FUJITSU LTD12 citations73