Inventor
MALE MATHIAS
AT3 patents
Patents
3 patentsUS9410249B2Aug 9, 2016
Wafer releasing
INFINEON TECHNOLOGIES AG18 citations89
US12018369B2Jun 25, 2024
Substrate processing chamber and process gas flow deflector for use in the processing chamber
INFINEON TECHNOLOGIES AG0 citations48
US10186445B2Jan 22, 2019
Wafer releasing
INFINEON TECHNOLOGIES AG0 citations48