Inventor
LIANG TED
US4 patents
Patents
4 patentsUS6720118B2Apr 13, 2004
Enhanced inspection of extreme ultraviolet mask
INTEL CORP29 citations91
US6583068B2Jun 24, 2003
Enhanced inspection of extreme ultraviolet mask
INTEL CORP23 citations91
US6897157B2May 24, 2005
Method of repairing an opaque defect on a mask with electron beam-induced chemical etching
INTEL CORP35 citations85
US6774990B2Aug 10, 2004
Method to inspect patterns with high resolution photoemission
INTEL CORP7 citations71