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Inventor
CHAN ELVIS M
US
2 patents
⚠️ This page may combine multiple inventors who share the name “CHAN ELVIS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC ELECTRONICS AMERICA INC
1 patent
US7344989B2
Mar 18, 2008
CMP wafer contamination reduced by insitu clean
NEC ELECTRONICS AMERICA INC
2 citations
55
RENESAS ELECTRONICS AMERICA IN
1 patent
US7795150B2
Sep 14, 2010
Metal capping of damascene structures to improve reliability using hyper selective chemical-mechanical deposition
RENESAS ELECTRONICS AMERICA IN
1 citations
42