Inventor

MAUL GUENTER

DE6 patents

⚠️ This page may combine multiple inventors who share the name “MAUL GUENTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7130017B2Oct 31, 2006

Device for sealing a projection exposure apparatus

ZEISS CARL SMT AG2 citations58

US7126692B2Oct 24, 2006

Device for holding measurement instruments

ZEISS CARL SMT AG0 citations40

ZEISS CARL SEMICONDUCTOR MFG

1 patent

US6864988B2Mar 8, 2005

Optical system with isolated measuring structure

ZEISS CARL SEMICONDUCTOR MFG24 citations90

ZEISS STIFTUNG

1 patent

US6445510B1Sep 3, 2002

Optical imaging device, in particular lens system, with at least one system diaphragm

ZEISS STIFTUNG29 citations89

AMSL NETHERLANDS BV

1 patent

US6750949B2Jun 15, 2004

Lithographic apparatus and device manufacturing method

AMSL NETHERLANDS BV19 citations88

HOF ALBRECHT

1 patent

US8253947B2Aug 28, 2012

Device and method for measuring lithography masks

HOF ALBRECHT0 citations39