Inventor

POH KIAN-SOONG

SG2 patents

⚠️ This page may combine multiple inventors who share the name “POH KIAN-SOONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

1 patent

US8021492B2Sep 20, 2011

Method of cleaning turbo pump and chamber/turbo pump clean process

UNITED MICROELECTRONICS CORP2 citations52

POH KIAN-SOONG

1 patent

US8277567B2Oct 2, 2012

Method of cleaning turbo pump and chamber/turbo pump clean process

POH KIAN-SOONG0 citations35