Inventor

OHASHI TOMOTSUGU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OHASHI TOMOTSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAT UNIVERSITY CORP OF TOHOKU UNIVERSITY

1 patent

US8728338B2May 20, 2014

Ultra high-speed wet etching apparatus

NAT UNIVERSITY CORP OF TOHOKU UNIVERSITY3 citations50

OHMI TADAHIRO

1 patent

US9240505B2Jan 19, 2016

Method of etching backside Si substrate of SOI substrate to expose SiO2 layer using fluonitric acid

OHMI TADAHIRO0 citations37