Inventor
BRIGGS JOSEPH SCOTT
US4 patents
Patents
4 patentsUS9384998B2Jul 5, 2016
Technique to deposit sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP32 citations93
US9997372B2Jun 12, 2018
Technique to deposit sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP18 citations92
US9378971B1Jun 28, 2016
Technique to deposit sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP43 citations92
US10373840B2Aug 6, 2019
Technique to deposit sidewall passivation for high aspect ratio cylinder etch
LAM RES CORP5 citations72