Inventor
JI CHUNHAI
US8 patents
⚠️ This page may combine multiple inventors who share the name “JI CHUNHAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS9644271B1May 9, 2017
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
LAM RES CORP21 citations93
US9362133B2Jun 7, 2016
Method for forming a mask by etching conformal film on patterned ashable hardmask
LAM RES CORP19 citations92
US9589799B2Mar 7, 2017
High selectivity and low stress carbon hardmask by pulsed low frequency RF power
LAM RES CORP10 citations83
US10192759B2Jan 29, 2019
Image reversal with AHM gap fill for multiple patterning
LAM RES CORP4 citations72
US10475627B2Nov 12, 2019
Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition
LAM RES CORP3 citations68
US12565701B2Mar 3, 2026
Undercoating coverage and resistance control for ESCS of substrate processing systems
LAM RES CORP0 citations59
US9941113B2Apr 10, 2018
Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication
LAM RES CORP0 citations51