Inventor
WALTHER ARNAUD
DE29 patents
⚠️ This page may combine multiple inventors who share the name “WALTHER ARNAUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
15 patentsUS9828237B2Nov 28, 2017
MEMS device and MEMS vacuum microphone
INFINEON TECHNOLOGIES AG25 citations93
US10676346B2Jun 9, 2020
MEMS component and production method for a MEMS component
INFINEON TECHNOLOGIES AG11 citations85
US10669151B2Jun 2, 2020
Double-membrane MEMS component and production method for a double-membrane MEMS component
INFINEON TECHNOLOGIES AG13 citations85
US10589990B2Mar 17, 2020
MEMS microphone
INFINEON TECHNOLOGIES AG14 citations85
US10560771B2Feb 11, 2020
Microelectromechanical microphone
INFINEON TECHNOLOGIES AG12 citations85
US10641626B2May 5, 2020
MEMS sensors, methods for providing same and method for measuring a fluid constituent
INFINEON TECHNOLOGIES AG11 citations84
US10129676B2Nov 13, 2018
MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone
INFINEON TECHNOLOGIES AG15 citations84
US10189699B2Jan 29, 2019
MEMS device and MEMS vacuum microphone
INFINEON TECHNOLOGIES AG13 citations83
US9706294B2Jul 11, 2017
System and method for an acoustic transducer and environmental sensor package
INFINEON TECHNOLOGIES AG7 citations82
US11161735B2Nov 2, 2021
Double-membrane MEMS component and production method for a double-membrane MEMS component
INFINEON TECHNOLOGIES AG3 citations73
US10575101B2Feb 25, 2020
Microelectromechanical microphone
INFINEON TECHNOLOGIES AG5 citations73
US11470426B2Oct 11, 2022
MEMS devices
INFINEON TECHNOLOGIES AG0 citations62
US11180361B2Nov 23, 2021
MEMS device and method for producing the same
INFINEON TECHNOLOGIES AG0 citations52
US10913656B2Feb 9, 2021
Method for sealing an access opening to a cavity and MEMS component comprising a sealing element
INFINEON TECHNOLOGIES AG0 citations51
US10028052B2Jul 17, 2018
System and method for an acoustic transducer and environmental sensor package
INFINEON TECHNOLOGIES AG0 citations50
WALTHER ARNAUD
6 patentsUS8847589B2Sep 30, 2014
Magnetic field sensor with suspended stress gauge
WALTHER ARNAUD14 citations83
US8616059B2Dec 31, 2013
Force sensor with reduced noise
WALTHER ARNAUD7 citations83
US9038460B2May 26, 2015
Inertial unit with several detection axes
WALTHER ARNAUD5 citations72
US9010193B2Apr 21, 2015
Inertial sensor having an oscillating rotating disk
WALTHER ARNAUD4 citations72
US8860403B2Oct 14, 2014
Gradient sensor of a component of a magnetic field with permanent magnet
WALTHER ARNAUD3 citations57
US9448070B2Sep 20, 2016
Gyrometer with reduced parasitic capacitances
WALTHER ARNAUD1 citations50
ROBERT PHILIPPE
2 patentsUS9061895B2Jun 23, 2015
Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
ROBERT PHILIPPE8 citations84
US8783113B2Jul 22, 2014
MEMS dynamic pressure sensor, in particular for applications to microphone production
ROBERT PHILIPPE19 citations84