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Inventor

CARLSON FREDERICK M

US10 patents
⚠️ This page may combine multiple inventors who share the name “CARLSON FREDERICK M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

6 patents
US9957636B2May 1, 2018

System and method for crystalline sheet growth using a cold block and gas jet

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10030317B2Jul 24, 2018

Apparatus and method for controlling thickness of a crystalline sheet grown on a melt

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations70
US10415151B1Sep 17, 2019

Apparatus for controlling heat flow within a silicon melt

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations61
US10179958B2Jan 15, 2019

Apparatus and method for crystalline sheet growth

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
US9587324B2Mar 7, 2017

Apparatus for processing a melt

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations49
US10106911B2Oct 23, 2018

Method for growing a silicon crystal substrate from a melt by directing a flow of molten silicon around a baffle structure

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47

AXCELIS TECH INC

2 patents
US7033443B2Apr 25, 2006

Gas-cooled clamp for RTP

AXCELIS TECH INC17 citations83
US6735378B1May 11, 2004

Pressure controlled heat source and method for using such for RTP

AXCELIS TECH INC8 citations72

LEADING EDGE CRYSTAL TECH INC

1 patent
US10801125B2Oct 13, 2020

Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly

LEADING EDGE CRYSTAL TECH INC1 citations56

CARLSON FREDERICK M

1 patent
US9464364B2Oct 11, 2016

Thermal load leveling during silicon crystal growth from a melt using anisotropic materials

CARLSON FREDERICK M0 citations40