Inventor
SUN JUNLING
US8 patents
⚠️ This page may combine multiple inventors who share the name “SUN JUNLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS11482454B2Oct 25, 2022
Methods for forming self-aligned contacts using spin-on silicon carbide
TOKYO ELECTRON LTD2 citations71
US12080599B2Sep 3, 2024
Methods for forming self-aligned contacts using spin-on silicon carbide
TOKYO ELECTRON LTD0 citations61
US11978631B2May 7, 2024
Forming contact holes with controlled local critical dimension uniformity
TOKYO ELECTRON LTD1 citations61
US11495436B2Nov 8, 2022
Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing
TOKYO ELECTRON LTD0 citations61
US10950460B2Mar 16, 2021
Method utilizing using post etch pattern encapsulation
TOKYO ELECTRON LTD0 citations50