Inventor
POVAZAY BORIS
AT11 patents
Patents
11 patentsUS10024741B2Jul 17, 2018
Measuring device and method for ascertaining a pressure map
EV GROUP E THALLNER GMBH15 citations75
US12025426B2Jul 2, 2024
Measuring device and method for determining the course of a bonding wave
EV GROUP E THALLNER GMBH2 citations63
US11209739B2Dec 28, 2021
Method and apparatus for aligning two optical subsystems
EV GROUP E THALLNER GMBH0 citations59
US11460777B2Oct 4, 2022
Method and device for exposure of photosensitive layer
EV GROUP E THALLNER GMBH1 citations56
US10852528B2Dec 1, 2020
Method and device for exposure of photosensitive layer
EV GROUP E THALLNER GMBH1 citations56
US12481222B2Nov 25, 2025
Method and device for the exposure of a photosensitive coating
EV GROUP E THALLNER GMBH0 citations52
US11865824B2Jan 9, 2024
Method and device for transferring a transfer layer
EV GROUP E THALLNER GMBH0 citations52
US11534868B2Dec 27, 2022
Device and method for separating a temporarily bonded substrate stack
EV GROUP E THALLNER GMBH1 citations52
US11040525B2Jun 22, 2021
Method for embossing micro-structures and/or nano-structures
EV GROUP E THALLNER GMBH0 citations52
US11681228B2Jun 20, 2023
Method and apparatus for illuminating image points
EV GROUP E THALLNER GMBH0 citations46
US10656078B2May 19, 2020
Metrology device and metrology method
EV GROUP E THALLNER GMBH0 citations43