Inventor
RAAB MARKUS
DE14 patents
⚠️ This page may combine multiple inventors who share the name “RAAB MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS12313978B2May 27, 2025
Optical assembly, projection exposure apparatus and method
ZEISS CARL SMT GMBH0 citations58
US12372877B2Jul 29, 2025
Projection exposure apparatus for semiconductor lithography
ZEISS CARL SMT GMBH0 citations54
US12130557B2Oct 29, 2024
Optical system and lithography apparatus
ZEISS CARL SMT GMBH0 citations51
US12443110B2Oct 14, 2025
Optical assembly, method for controlling an optical assembly, and projection exposure apparatus
ZEISS CARL SMT GMBH0 citations48