Inventor
WISE RICHARD STEPHEN
US16 patents
⚠️ This page may combine multiple inventors who share the name “WISE RICHARD STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS6051504AApr 18, 2000
Anisotropic and selective nitride etch process for high aspect ratio features in high density plasma
IBM39 citations90
US7892928B2Feb 22, 2011
Method of forming asymmetric spacers and methods of fabricating semiconductor device using asymmetric spacers
IBM12 citations84
US8018005B2Sep 13, 2011
CMOS (complementary metal oxide semiconductor) devices having metal gate NFETs and poly-silicon gate PFETs
IBM11 citations83
US7081393B2Jul 25, 2006
Reduced dielectric constant spacer materials integration for high speed logic gates
IBM8 citations73
US9659820B2May 23, 2017
Interconnect structure having large self-aligned vias
IBM3 citations71
US7659616B2Feb 9, 2010
On-chip cooling systems for integrated circuits
IBM2 citations57
US7749830B2Jul 6, 2010
CMOS (complementary metal oxide semiconductor) devices having metal gate NFETS and poly-silicon gate PFETS
IBM0 citations51
ST MICROELECTRONICS INC
5 patentsUS9391020B2Jul 12, 2016
Interconnect structure having large self-aligned vias
ST MICROELECTRONICS INC7 citations82
US9214429B2Dec 15, 2015
Trench interconnect having reduced fringe capacitance
ST MICROELECTRONICS INC5 citations71
US10546743B2Jan 28, 2020
Advanced interconnect with air gap
ST MICROELECTRONICS INC0 citations51
US9658523B2May 23, 2017
Interconnect structure having large self-aligned vias
ST MICROELECTRONICS INC0 citations51
US9786551B2Oct 10, 2017
Trench structure for high performance interconnection lines of different resistivity and method of making same
ST MICROELECTRONICS INC0 citations41