Inventor
LACHENBRUCH ROGER B
US7 patents
⚠️ This page may combine multiple inventors who share the name “LACHENBRUCH ROGER B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEGAL CORP
6 patentsUS4790258ADec 13, 1988
Magnetically coupled wafer lift pins
TEGAL CORP420 citations96
US4724510AFeb 9, 1988
Electrostatic wafer clamp
TEGAL CORP89 citations95
US4786359ANov 22, 1988
Xenon enhanced plasma etch
TEGAL CORP87 citations94
US4801241AJan 31, 1989
Modular article processing machine and method of article handling therein
TEGAL CORP42 citations91
US4619573AOct 28, 1986
Article transport apparatus
TEGAL CORP32 citations88
US4547248AOct 15, 1985
Automatic shutoff valve
TEGAL CORP1 citations48