Inventor
ANDO AKITO
JP4 patents
Patents
4 patentsUS5344539ASep 6, 1994
Electrochemical fine processing apparatus
SEIKO INSTR INC71 citations95
US5686207ANov 11, 1997
Method of forming and repairing a mask for photolithography
SEIKO INSTR INC9 citations72
US5366613ANov 22, 1994
Method of electrochemical fine processing
SEIKO INSTR INC5 citations61
US5288382AFeb 22, 1994
Optical fine processing apparatus
SEIKO INSTR INC0 citations51