Inventor

NAM KI-HEUM

KR5 patents

⚠️ This page may combine multiple inventors who share the name “NAM KI-HEUM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US6099302AAug 8, 2000

Semiconductor wafer boat with reduced wafer contact area

SAMSUNG ELECTRONICS CO LTD660 citations96

US6402849B2Jun 11, 2002

Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device

SAMSUNG ELECTRONICS CO LTD105 citations95

US6302962B1Oct 16, 2001

Diffusion system having air curtain formation function for manufacturing semiconductor devices and method of controlling the same

SAMSUNG ELECTRONICS CO LTD16 citations82

US7271492B2Sep 18, 2007

Photo mask set for forming multi-layered interconnection lines and semiconductor device fabricated using the same

SAMSUNG ELECTRONICS CO LTD2 citations60

KIM SUNG-JIN

1 patent

US8103976B2Jan 24, 2012

Photo mask set for forming multi-layered interconnection lines and semiconductor device fabricated using the same

KIM SUNG-JIN4 citations60