Inventor
ABBOUD FAYEZ E
US8 patents
Patents
8 patentsUS6833717B1Dec 21, 2004
Electron beam test system with integrated substrate transfer module
APPLIED MATERIALS INC35 citations92
US6433348B1Aug 13, 2002
Lithography using multiple pass raster-shaped beam
APPLIED MATERIALS INC63 citations90
US7355418B2Apr 8, 2008
Configurable prober for TFT LCD array test
APPLIED MATERIALS INC14 citations83
US7919972B2Apr 5, 2011
Integrated substrate transfer module
APPLIED MATERIALS INC5 citations73
US7746088B2Jun 29, 2010
In-line electron beam test system
APPLIED MATERIALS INC6 citations73
US7535238B2May 19, 2009
In-line electron beam test system
APPLIED MATERIALS INC5 citations73
US7330021B2Feb 12, 2008
Integrated substrate transfer module
APPLIED MATERIALS INC6 citations73
US7973546B2Jul 5, 2011
In-line electron beam test system
APPLIED MATERIALS INC1 citations62