Inventor
CHEN CHENG-KU
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHENG-KU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS6500727B1Dec 31, 2002
Silicon shallow trench etching with round top corner by photoresist-free process
TAIWAN SEMICONDUCTOR MFG25 citations92
US7071515B2Jul 4, 2006
Narrow width effect improvement with photoresist plug process and STI corner ion implantation
TAIWAN SEMICONDUCTOR MFG42 citations90
US6787455B2Sep 7, 2004
Bi-layer photoresist method for forming high resolution semiconductor features
TAIWAN SEMICONDUCTOR MFG16 citations84
US7291553B2Nov 6, 2007
Method for forming dual damascene with improved etch profiles
TAIWAN SEMICONDUCTOR MFG9 citations73
US7129140B2Oct 31, 2006
Method of forming polysilicon gate structures with specific edge profiles for optimization of LDD offset spacing
TAIWAN SEMICONDUCTOR MFG9 citations73
US7399679B2Jul 15, 2008
Narrow width effect improvement with photoresist plug process and STI corner ion implantation
TAIWAN SEMICONDUCTOR MFG5 citations71
US5962193AOct 5, 1999
Method and apparatus for controlling air flow in a liquid coater
TAIWAN SEMICONDUCTOR MFG10 citations71
US7633110B2Dec 15, 2009
Memory cell
TAIWAN SEMICONDUCTOR MFG6 citations62
US7371634B2May 13, 2008
Amorphous carbon contact film for contact hole etch process
TAIWAN SEMICONDUCTOR MFG5 citations62