Inventor
PENG SHI-SHUNG
TW2 patents
Patents
2 patentsUS7071515B2Jul 4, 2006
Narrow width effect improvement with photoresist plug process and STI corner ion implantation
TAIWAN SEMICONDUCTOR MFG42 citations90
US7399679B2Jul 15, 2008
Narrow width effect improvement with photoresist plug process and STI corner ion implantation
TAIWAN SEMICONDUCTOR MFG5 citations71