Inventor
MOHAMMED BALARABE N
US10 patents
Patents
10 patentsUS7459003B2Dec 2, 2008
In-line filter in a diffusion bonded layered substrate
APPLIED MATERIALS INC14 citations91
US7448276B2Nov 11, 2008
Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate
APPLIED MATERIALS INC15 citations91
US8020750B2Sep 20, 2011
Method of attaching components to fluid delivery systems using diffusion bonding
APPLIED MATERIALS INC5 citations72
US7559527B2Jul 14, 2009
Diffusion bonded fluid flow manifold with partially integrated inter-active component
APPLIED MATERIALS INC5 citations72
US10222810B2Mar 5, 2019
Methods for monitoring a flow controller coupled to a process chamber
APPLIED MATERIALS INC2 citations69
US9772629B2Sep 26, 2017
Methods for monitoring a flow controller coupled to a process chamber
APPLIED MATERIALS INC4 citations69
US9644796B2May 9, 2017
Methods for in-situ calibration of a flow controller
APPLIED MATERIALS INC3 citations69
US7984891B2Jul 26, 2011
Manufacture of an integrated fluid delivery system for semiconductor processing apparatus
APPLIED MATERIALS INC2 citations58
US8017028B2Sep 13, 2011
Method of increasing etchability of metals having chemical etching resistant microstructure
APPLIED MATERIALS INC0 citations50
US7850786B2Dec 14, 2010
Method of improving corrosion resistance of stainless steel surfaces by a process of passivation
APPLIED MATERIALS INC0 citations50