Inventor
KASHIWAGI YUSAKU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KASHIWAGI YUSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS8378464B2Feb 19, 2013
Method for manufacturing semiconductor device, semiconductor device, semiconductor manufacturing apparatus and storage medium
TOKYO ELECTRON LTD463 citations98
US10041174B2Aug 7, 2018
Method for forming carbon nanotubes and carbon nanotube film forming apparatus
TOKYO ELECTRON LTD39 citations93
US9059178B2Jun 16, 2015
Method for forming carbon nanotubes and carbon nanotube film forming apparatus
TOKYO ELECTRON LTD36 citations93
US10453681B2Oct 22, 2019
Method of selective vertical growth of a dielectric material on a dielectric substrate
TOKYO ELECTRON LTD5 citations73
US9293543B2Mar 22, 2016
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations72
US9219008B2Dec 22, 2015
Graphene patterning method and patterning member
TOKYO ELECTRON LTD2 citations62
US7662728B2Feb 16, 2010
Substrate processing method
TOKYO ELECTRON LTD2 citations62
US7601402B2Oct 13, 2009
Method for forming insulation film and apparatus for forming insulation film
TOKYO ELECTRON LTD2 citations62
US11041239B2Jun 22, 2021
Film forming method for SiC film
TOKYO ELECTRON LTD0 citations59
US7867922B2Jan 11, 2011
Film forming method for dielectric film
TOKYO ELECTRON LTD1 citations51
US10490443B2Nov 26, 2019
Selective film forming method and method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations40
US7645481B2Jan 12, 2010
Fabrication of low dielectric constant insulating film
TOKYO ELECTRON LTD0 citations40