Inventor

SAITO KEIYA

JP18 patents

⚠️ This page may combine multiple inventors who share the name “SAITO KEIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAITO KEIYA

HITACHI LTD

Method of manufacturing devices having superlattice structures

Method and apparatus for measuring thickness of thin film and device manufacturing method using same

Device having superlattice structure, and method of and apparatus for manufacturing the same

IC wiring connecting method and resulting article

IC wiring connecting method and apparatus

Method and apparatus for processing a fine pattern

Method and apparatus for correcting defects of X-ray mask

Method of correcting defect in circuit pattern

Method and apparatus for detecting defects of printed circuit patterns

Method and apparatus for measuring thickness of thin film and device manufacturing method using same

IC wiring connecting method and apparatus

Method and apparatus for testing pattern of a printed circuit board

IC wiring connecting method using focused energy beams

HITACHI HIGH TECH CORP

Method and apparatus for reviewing defect

Method for optically detecting height of a specimen and charged particle beam apparatus using the same

Method and apparatus for inspecting a pattern shape

SASAZAWA HIDEAKI

Scatterometry method and device for inspecting patterned medium

SAITO KEIYA

Pattern shape inspection method and apparatus thereof