Inventor
DZENGELESKI JOSEPH P
US10 patents
⚠️ This page may combine multiple inventors who share the name “DZENGELESKI JOSEPH P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
7 patentsUS7498590B2Mar 3, 2009
Scan pattern for an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT10 citations81
US7442944B2Oct 28, 2008
Ion beam implant current, spot width and position tuning
VARIAN SEMICONDUCTOR EQUIPMENT9 citations79
US7652270B2Jan 26, 2010
Techniques for ion beam current measurement using a scanning beam current transformer
VARIAN SEMICONDUCTOR EQUIPMENT2 citations61
US9287085B2Mar 15, 2016
Processing apparatus and method of treating a substrate
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US7521691B2Apr 21, 2009
Magnetic monitoring of a Faraday cup for an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT2 citations54
US7383141B2Jun 3, 2008
Faraday system integrity determination
VARIAN SEMICONDUCTOR EQUIPMENT0 citations48
US8698108B1Apr 15, 2014
Ion beam measurement system and method
VARIAN SEMICONDUCTOR EQUIPMENT1 citations46